The reading head of the linear encoder RGH25F UHV is used with Renishaw´s RGS20-S scale tape, providing reliable feedback on the position in ultra-high vacuum conditions. It has proven itself over many years of operation, the RGH25F UHV head is used worldwide in semiconductor devices and scientific equipment, where exceptional reliability and the highest performance are required.\n<\/p>\n
\n Compatibility with REF interfaces <\/b>\n<\/p>\n
\n In order to increase the efficiency and reliability of the service, the interfaces of the RGB and RGF series have been replaced by a REF interface that meets the requirements of the RoHS Directive and provides dynamic signal processing and resolution up to 5 nm!
\nThe reading head RGH25F UHV is manufactured in extremely clean conditions, using materials and glues with low gas evolution. The finished product is packed and sealed in a special bag in order to ensure proper cleanliness.\n<\/p>\n
\n Scale tape that can be used in a vacuum <\/b>\n<\/p>\n
\nThe RGS20-S scale tape features a high repeatability of measurement results and can be installed on substrates of most materials used commonly in the semiconductor industry and sectors where equipment for research activities is made. Such materials include, in particular, Invar\u00ae, Zerodur\u00ae, stainless steel and aluminum. After the ends of the scale are fixed to the substrate using the epoxy adhesive of the recommended type, the change in the state of the scale will correspond to the coefficient of thermal expansion of the substrate, and as a result, this system works as if the calibration was applied to the substrate itself.\n<\/p>\n
\n Results of analysis of the composition of residual gases
\n<\/b>\n<\/p>\n
\nThe results of an independent analysis of the residual gases showed the suitability of the entire system as a whole for operation in a vacuum. The system can also be degassed at 120 degrees Celsius and then used in ultra-high vacuum conditions. Typical examples of the application of this system: feeding and moving semiconductor wafers and their verification, as well as conducting research.\n<\/p>\n
Specifications <\/b><\/p>\n RGH25F UHV linear encoder reading head <\/b> is used with the Renishaw RGS20-S ribbon, providing reliable position feedback in ultra-high vacuum conditions!\n
\n Built-in LED head position indicator <\/td>\n \t Yes <\/td>\n<\/tr>\n \n Measuring range, m:<\/td>\n \t\u0434\u043e 50<\/td>\n<\/tr>\n \n Length, m:<\/td>\n \u2014 optical scale RGS20\u2013S \u2014 from 0,1 to 50 (more than 50 m \u2014 by special order) \u2014 optical scale RGS20\u2013PC \u2014 from 1 to 50<\/td>\n<\/tr>\n \n Resolution of digital output signal RS422, nm:<\/td>\n \t5, 10, 20, 50 , 100, 200, 500, 1000, 5000<\/td>\n<\/tr>\n \n Resolution of analog output signal:<\/td>\n \t\u2014 1 Vpp <\/td>\n<\/tr>\n \n Step of the scale, mkm:<\/td>\n \t\u2014 optical scale RGS20\u2013S \u2014 20 \u2014 optical scale RGS20\u2013PC \u2014 20<\/td>\n<\/tr>\n \n Max speed, m\/s:<\/td>\n \t\u2014 for digital output signal \u2014 up to 5 \u2014 for analog output signal \u2014 up to 6<\/td>\n<\/tr>\n \n Clearance between reading head and optical scale, mm:<\/td>\n \t0,8 \u00b1 0,1<\/td>\n<\/tr>\n \n System accuracy at 20 \u00b0 C, μm\/m:<\/td>\n \t\u00b1 15 (\u00b1 3 \u2014 with 2-point compensation)<\/td>\n<\/tr>\n \n Scale option:<\/td>\n \t\u2014 with self-adhesive base\n <\/td>\n<\/tr>\n \n Coefficient of thermal expansion, μm\/m\/\u00b0\u0421:<\/td>\n \t\u2014 corresponds to the substrate material, the ends of the scale are fastened by clamps <\/td>\n<\/tr>\n \n Supply voltage, V:<\/td>\n \t5 \u2013 5 % \u2014 + 10 %<\/td>\n<\/tr>\n \n Current consumption (without load), mA:<\/td>\n \t\u2014 reading head \u2014 50 \u2014 system \u2014 200 <\/td>\n<\/tr>\n \n Material:<\/td>\n \u2014 optical scale RGS20\u2013S \u2014 thin,
\nflexible steel gilded strip with protective lacquer coating \u2014 optical scale RGS20\u2013PC \u2014 thin,
\nflexible steel gilded strip with protective polyester coating
\n for increased resistance to the effects of aggressive chemicals <\/td>\n<\/tr>\n\n Cable:<\/td>\n \t\u2014 Flexible, braided, tinned copper, with single shielding, protected by PTFE insulation <\/td>\n<\/tr>\n \n Length of the cable, m:<\/td>\n \t1.5, 3, 5 (connector type D-sub (15-pin), not applicable in ultra-high vacuum, designed to connect to the REF-interface) <\/td>\n<\/tr>\n \n Dimensions of the reading head RGH24 (height × length × width), mm::<\/td>\n 10,5 × 36,0 × 13,5<\/td>\n<\/tr>\n \n Mass, g:<\/td>\n \u2014 reading head \u2014 9 \u2014 interface \u2014 100 <\/td>\n<\/tr>\n \n Mass of the cable, g\/m:<\/td>\n 23<\/td>\n<\/tr>\n \n Reference mark (zero):<\/td>\n Magnetic actuator (one-way repeatability up to 1 resolution unit)<\/td>\n<\/tr>\n \n Limit switches:<\/td>\n One switch <\/td>\n<\/tr>\n \n Temperature, \u00b0\u0421:<\/td>\n \u2014 process \u2014 from 0 to + 55 \u2014 storage \u2014 from \u2013 20 to + 70 \u2014 degassing – 120 (only for reading head)<\/td>\n<\/tr>\n \n Degree of protection:<\/td>\n \t\u2014 reading head \u2014 IP40 \u2014 interface \u2014 IP20<\/td>\n<\/tr>\n \n Maximum humidity (without compensation), %:<\/td>\n \t\u2014 process \u2014 80 \u2014 storage \u2014 95<\/td>\n<\/tr>\n \n Process acceleration, m\/s 2:<\/td>\n \t500<\/td>\n<\/tr>\n \n Impact (in non-operating state, 6 ms, half-sinusoidal impulse), m\/s, 2:<\/td>\n \t1000<\/td>\n<\/tr>\n \n Vibration (in operation mode, at, at 55-2000 Hz), m\/s 2:<\/td>\n \tnot more than 100<\/td>\n<\/tr>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"
\nReliability, proven by many years of use in semiconductor devices and scientific equipment around the world! <\/p>\n","protected":false},"featured_media":26072,"template":"","meta":[],"product_cat":[1930],"product_tag":[],"producers":[2203],"_links":{"self":[{"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/product\/26069"}],"collection":[{"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/types\/product"}],"version-history":[{"count":1,"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/product\/26069\/revisions"}],"predecessor-version":[{"id":47005,"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/product\/26069\/revisions\/47005"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/media\/26072"}],"wp:attachment":[{"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/media?parent=26069"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/product_cat?post=26069"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/product_tag?post=26069"},{"taxonomy":"producers","embeddable":true,"href":"https:\/\/test.koda.ua\/en\/wp-json\/wp\/v2\/producers?post=26069"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}